SUBSTRATE PROCESSING APPARATUS, EQUIPMENT FOR MANUFACTURING FLAT-PANEL DISPLAY, AND FLAT-PANEL DISPLAY

PROBLEM TO BE SOLVED: To make apparatus constitution compact and to increase productivity by eliminating an inspection stage. SOLUTION: A substrate processing apparatus includes: a movable rail 32 for pitch-forwarding, after processing is performed in each processing stage 20, a panel board 1 toward the next processing stage 20; a line sensor camera 41 which is installed in the processing stage 20 or between precedent and subsequent processing stages 20 and in which photodetectors are arrayed in a direction orthogonal to the panel board 1 feed direction, for photographing the panel board 1; an encoder detecting sensor 61 detecting the moving speed of the panel board 1; and an image processing device 43 generating a frame image from video signals obtained by the line sensor camera 41. On the basis of the moving speed detected by the encoder detecting sensor 61, correction is performed so as to make equal the intervals between video signals, and the frame image is generated. COPYRIGHT: (C)2010,JPO&INPIT