APPARATUS AND METHOD FOR THREE-DIMENSIONAL SHAPE MEASUREMENT

PROBLEM TO BE SOLVED: To accurately obtain resolution higher than that obtained by an image sensor alone. SOLUTION: A three-dimensional shape measuring apparatus 1 receives reflected light of detection light U projected toward a target Q on an imaging surface of the image sensor 52 and measures a th...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	YASHIRO TAKEHIRO
Format:	Patent
Sprache:	eng
Schlagworte:	MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
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