APPARATUS AND METHOD FOR THREE-DIMENSIONAL SHAPE MEASUREMENT

PROBLEM TO BE SOLVED: To accurately obtain resolution higher than that obtained by an image sensor alone. SOLUTION: A three-dimensional shape measuring apparatus 1 receives reflected light of detection light U projected toward a target Q on an imaging surface of the image sensor 52 and measures a three-dimensional shape of the target based on imaging data DS acquired by the image sensor. The image sensor is provided to be movable by a minute distance. The imaging data DS is acquired by capturing images of the image sensor before and after movement. In addition, a travel KD of the image sensor is measured. Based on the imaging data acquired before the movement of the image sensor, the imaging data acquired after the movement, and the travel KD of the image sensor, three-dimensional shape data with higher resolution than that of three-dimensional shape data obtained from any imaging data is obtained. COPYRIGHT: (C)2010,JPO&INPIT