ACCELERATION SENSOR ELEMENT, ACCELERATION SENSOR DEVICE, AND METHOD OF MANUFACTURING THE ACCELERATION SENSOR ELEMENT

PROBLEM TO BE SOLVED: To provide an acceleration sensor element that is miniaturizable while maintaining sensitivity. SOLUTION: The sensor element 20 includes: a weight 11 having a recess 21 opened downward; a frame-shaped fixing part 13 enclosing the weight 11; a beam 12 with one end connected to t...

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Bibliographische Detailangaben

1. Verfasser:	UMESATO KAZUMASA
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT MEASURING MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK PHYSICS SEMICONDUCTOR DEVICES TESTING
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