ACCELERATION SENSOR ELEMENT, ACCELERATION SENSOR DEVICE, AND METHOD OF MANUFACTURING THE ACCELERATION SENSOR ELEMENT

PROBLEM TO BE SOLVED: To provide an acceleration sensor element that is miniaturizable while maintaining sensitivity. SOLUTION: The sensor element 20 includes: a weight 11 having a recess 21 opened downward; a frame-shaped fixing part 13 enclosing the weight 11; a beam 12 with one end connected to t...

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1. Verfasser:	UMESATO KAZUMASA
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT MEASURING MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK PHYSICS SEMICONDUCTOR DEVICES TESTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide an acceleration sensor element that is miniaturizable while maintaining sensitivity. SOLUTION: The sensor element 20 includes: a weight 11 having a recess 21 opened downward; a frame-shaped fixing part 13 enclosing the weight 11; a beam 12 with one end connected to the fixing part 13, and the other end connected to the weight 11; a resistance element 15 provided on the beam 12, whose resistance value is changed following bending of the beam 12; a weight member 11 comprising a material having a greater specific gravity than a material of the weight 11, to be buried into the recess 21; and a lid member 16 fixed to the weight 11 with an opening of the recess 21 blocked. COPYRIGHT: (C)2010,JPO&INPIT