ACCELERATION SENSOR ELEMENT, ACCELERATION SENSOR DEVICE, AND METHOD OF MANUFACTURING THE ACCELERATION SENSOR ELEMENT

ACCELERATION SENSOR ELEMENT, ACCELERATION SENSOR DEVICE, AND METHOD OF MANUFACTURING THE ACCELERATION SENSOR ELEMENT

PROBLEM TO BE SOLVED: To provide an acceleration sensor element that is miniaturizable while maintaining sensitivity. SOLUTION: The sensor element 20 includes: a weight 11 having a recess 21 opened downward; a frame-shaped fixing part 13 enclosing the weight 11; a beam 12 with one end connected to t...

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1. Verfasser: UMESATO KAZUMASA
Format: Patent
Sprache:eng
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BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
MEASURING
MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK
PHYSICS
SEMICONDUCTOR DEVICES
TESTING
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creator UMESATO KAZUMASA
description PROBLEM TO BE SOLVED: To provide an acceleration sensor element that is miniaturizable while maintaining sensitivity. SOLUTION: The sensor element 20 includes: a weight 11 having a recess 21 opened downward; a frame-shaped fixing part 13 enclosing the weight 11; a beam 12 with one end connected to the fixing part 13, and the other end connected to the weight 11; a resistance element 15 provided on the beam 12, whose resistance value is changed following bending of the beam 12; a weight member 11 comprising a material having a greater specific gravity than a material of the weight 11, to be buried into the recess 21; and a lid member 16 fixed to the weight 11 with an opening of the recess 21 blocked. COPYRIGHT: (C)2010,JPO&INPIT
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subjects BASIC ELECTRIC ELEMENTS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
MEASURING
MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION,OR SHOCK
PHYSICS
SEMICONDUCTOR DEVICES
TESTING
title ACCELERATION SENSOR ELEMENT, ACCELERATION SENSOR DEVICE, AND METHOD OF MANUFACTURING THE ACCELERATION SENSOR ELEMENT
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