SEMICONDUCTOR MANUFACTURING APPARATUS

PROBLEM TO BE SOLVED: To provide a semiconductor manufacturing apparatus for quickly and accurately changing a controlled variable to a target value to thereby make the controlled variable quickly follow the target value, automatically adjusting the controlled variable and target value, and improving the production efficiency of the process. SOLUTION: The semiconductor manufacturing apparatus includes: a PID adjustment unit 2 to which a target value and a detected control value are input through an adder 1; a pattern generation unit 8 having an approximate function for calculating a pattern output and for changing the pattern output in response to a parameter value of the approximate function; and a switching unit 6 for switching between an output including at least an output of the pattern generation unit 8 and an output of the PID adjustment unit 2 to thereby generate an output. COPYRIGHT: (C)2010,JPO&INPIT