LIQUID JET HEAD, LIQUID JET DEVICE, AND ACTUATOR DEVICE

PROBLEM TO BE SOLVED: To provide a liquid jet head capable of reducing the crack of a ceramic vibration plate, thereby improving durability and reliability, and to provide a liquid jet device and an actuator device. SOLUTION: The liquid jet head includes: a pressure generating chamber 12 communicate...

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1. Verfasser: SAWAZAKI TATSUO
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide a liquid jet head capable of reducing the crack of a ceramic vibration plate, thereby improving durability and reliability, and to provide a liquid jet device and an actuator device. SOLUTION: The liquid jet head includes: a pressure generating chamber 12 communicated with a nozzle opening; a silicon oxide film 50 provided on one surface side of the pressure generating chamber 12; the ceramic vibration plate 55 provided on the side opposite to the pressure generating chamber 12 of the silicon oxide film 50; and a pressure generating element 300 provided above the ceramic vibration plate 55 and generating a pressure change in the pressure generating chamber. A metal film 56 made of a precious metal material is provided between the silicon oxide film 50 and the ceramic vibration plate 55. COPYRIGHT: (C)2010,JPO&INPIT