ALIGNMENT APPARATUS, ALIGNMENT METHOD, APPARATUS FOR MANUFACTURING ORGANIC EL DEVICE, AND FILM-FORMING APPARATUS

PROBLEM TO BE SOLVED: To provide an alignment apparatus and an alignment method that enable precise alignment, and an apparatus for manufacturing an organic EL device and a film-forming apparatus that are capable of carrying out high-precision vapor deposition using the alignment apparatus and the alignment method, and to provide an apparatus for manufacturing an organic EL device and a film-forming apparatus that are capable of offering high productivity by reducing dust and heat generation in vacuum by disposing a driving part etc. required for alignment at the atmosphere side or offering high operating rate by increasing maintainability. SOLUTION: The alignment apparatus has a shadow mask having a through-hole for alignment and an alignment part having an alignment optical system and a control part. The alignment optical system has a light source that emits light from one end of the through-hole and an imaging means that takes an image of the other end, while the control part carries out alignment based on an output from the imaging means. In addition, the through-hole is a hole that penetrates the shadow mask from its anterior surface to its posterior surface, and the alignment optical system has a blocking means for blocking deposition of a treating material onto the through-hole at least during the treatment of the substrate. COPYRIGHT: (C)2010,JPO&INPIT