OPTICAL ELEMENT MODULE AND METHOD OF MANUFACTURING THE SAME

PROBLEM TO BE SOLVED: To provide an optical element module, which includes an optical element for receiving or emitting light, a semiconductor circuit element, and an optical fiber optically connected to the optical element, and which carries out highly-functional optical connection between the optical element and optical fiber, and to provide an effective method of manufacturing the same. SOLUTION: The optical element module 1 includes the optical element 8 and a semiconductor circuit element 9 mounted on one surface of a silicon substrate 2, and a mirror surface 2a formed on other surface and inclining at approximately 45°, and the optical fiber 7 facing the mirror surface and arranged in a V-shaped groove formed along the other surface. The method of manufacturing the optical element module 1 includes: a step of simultaneously forming the mirror surface 2a and a V-shaped side surface of the V-shaped groove on the other surface by first crystal anisotropic etching; and a step of forming an abutting surface 2b which is approximately perpendicular to the one surface and other surface, is formed on a tip end side of the V-shape groove, and abuts on a tip end of the optical fiber 7 by second crystal anisotropic etching of crystal plane orientation different from the first crystal anisotropic etching. COPYRIGHT: (C)2010,JPO&INPIT