SEMICONDUCTOR MANUFACTURING APPARATUS, AND METHOD FOR CHANGING OPERATION SCREEN OF THE SEMICONDUCTOR MANUFACTURING APPARATUS

PROBLEM TO BE SOLVED: To provide a semiconductor manufacturing apparatus that enhances user convenience, and to provide a method for changing the operation screen of the semiconductor manufacturing apparatus. SOLUTION: A simple screen setting password is input through a keyboard (S1); and when authentication of the password is successful, switching to a simple screen setting mode is performed to display a simple operation setting change screen (S2). When an operation item is added to the simple operation screen, the button for the operation item to be added to the simple operation screen is pressed down on a touch panel (S3), whereby the operation item is selected as an addition candidate (S4). A blank button at a position to which the operation item is to be added on the simple operation screen is depressed in this selected state (S5), and an addition button is then depressed, thereby the item data of the operation item in the selected state is recorded, while being associated with the information of the setting position of the blank button to form screen structure data (S6). Accordingly, the item data of the screen configuration data can be varied freely. COPYRIGHT: (C)2010,JPO&INPIT