METHOD FOR GROWING SILICON SINGLE CRYSTAL

PROBLEM TO BE SOLVED: To provide a method for growing a silicon single crystal capable of preventing the occurrence of a dislocation with the movement to the straight body part and simultaneously removing an overhang at the upper end part of the straight body part, in growing a silicon single crysta...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: SHIMOTORI HIROSHI, NAITO NORIMASA
Format: Patent
Sprache:eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!