AUTOMATIC PATTERN CHECKING APPARATUS

PROBLEM TO BE SOLVED: To provide an automatic pattern checking apparatus which gives a prescribed tensile force to a tape portion at an inspection section and reliably prevents transmission of vibrations to such a tape portion to improve imaging performance. SOLUTION: A transmitting-light-type inspe...

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Bibliographische Detailangaben
Hauptverfasser:	HARUKAWA KAZUNORI, MATSUNO SHUZO
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS CONVEYING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY HANDLING THIN OR FILAMENTARY MATERIAL HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS,CABLES INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PACKING PERFORMING OPERATIONS PHYSICS PRINTED CIRCUITS SEMICONDUCTOR DEVICES STORING TESTING TRANSPORTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide an automatic pattern checking apparatus which gives a prescribed tensile force to a tape portion at an inspection section and reliably prevents transmission of vibrations to such a tape portion to improve imaging performance. SOLUTION: A transmitting-light-type inspection section D is provided with a first tensile force giving device 43 which bends a tape 1 in the direction of thickness and with a second tensile force giving device 44 which gives the tape a tensile force in the direction of length. The first tensile force giving device 43 includes a pair of support rollers 46 and 47 which support the under surface of the tape 1 and a pair of press rollers 48 and 49 which press the tape 1 against the support rollers 46 and 47. The second tensile force giving device 44 includes a pair of clamp units 60 and 61 which supports the side edges of the tape 1 and a cylinder 64 which moves the clamp units 60 and 61 in the longitudinal direction of the tape 1 to give a tensile force to the tape 1. A pair of sucking means 66 sucks and holds the under surface of the tape 1. COPYRIGHT: (C)2010,JPO&INPIT