VACUUM GAUGE

PROBLEM TO BE SOLVED: To provide a vacuum gauge which can vibrate a vibrator in two directions with measurable pressure ranges different from each other, with electrostatic force by a pair of vibrating electrodes, and not requiring a circuit for switching the vibration direction by the pressure of a...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: SUZUKI TAKESHI, SHIMODA MASAYOSHI, ISHIKAWA NORIAKI
Format: Patent
Sprache:eng
Schlagworte:
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