VACUUM GAUGE

PROBLEM TO BE SOLVED: To provide a vacuum gauge which can vibrate a vibrator in two directions with measurable pressure ranges different from each other, with electrostatic force by a pair of vibrating electrodes, and not requiring a circuit for switching the vibration direction by the pressure of a gas to be measured. SOLUTION: A structure constituting a mechanical part of the vacuum gauge includes: a vibrator 4 having a spindle 1, a beam 2, and a vibrator fixing part 3; vibration electrodes 5 and 6 for vibrating the vibrator 4; vibration detection electrodes 7 and 8 for detecting vibration of the vibrator 4 in a first direction; and a vibration detection electrode 9 for detecting vibration in a second direction perpendicular to the first direction. The vibrator 4 and the vibration electrodes 5 and 6 are disposed in a substantially V-shape. COPYRIGHT: (C)2010,JPO&INPIT