SENSOR DEVICE, AND METHOD FOR MANUFACTURING THE SAME

PROBLEM TO BE SOLVED: To measure approximately simultaneously a plurality of mutually different pressures in a comparatively small structure space having only one sensor device, by improving a sensor device having a substrate element and a joint element, wherein the substrate element has a sensor structure part including a pressure sensing type diaphragm and a cavity arranged in a diaphragm domain, and having a form wherein the substrate element is connected to the joint element so that the cavity is connected to a hollow chamber of the joint element. SOLUTION: The substrate element 2 has at least one different sensor structure part 4' including a different pressure sensing type diaphragm 5' and a different cavity 6' arranged in a different diaphragm domain, and the different cavity 6' is connected at least to one joint element 3 or to a different hollow chamber 7' of a different joint element 3'. COPYRIGHT: (C)2010,JPO&INPIT