ELECTRIC CHARACTERISTICS MEASUREMENT DEVICE AND ELECTRIC CHARACTERISTICS MEASURING METHOD

PROBLEM TO BE SOLVED: To provide an electric characteristics measurement device and an electric characteristics measuring method capable of reducing measurement errors due to existence of sample holders. SOLUTION: The electric characteristics measurement device 1 comprises a sample holder 31 holding...

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Bibliographische Detailangaben
1. Verfasser:	BAN MEGUMI
Format:	Patent
Sprache:	eng
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide an electric characteristics measurement device and an electric characteristics measuring method capable of reducing measurement errors due to existence of sample holders. SOLUTION: The electric characteristics measurement device 1 comprises a sample holder 31 holding a measured sample 45a, a pair of electrodes 33 sandwiching the measured sample 45a, and a separating drive part 36 moving at least one of the sample holder 31 and the pair of electrodes 33 to separate the measured sample 45a and the sample holder 31. COPYRIGHT: (C)2010,JPO&INPIT