DEVICE AND METHOD FOR INSPECTING CAPILLARY ARRAY SHEET
PROBLEM TO BE SOLVED: To provide an inspection device and an inspection method of a capillary array sheet capable of detecting surely a gel defect of a through hole of the capillary array sheet. SOLUTION: This capillary array sheet inspection device 8 includes: a light source 10; a capillary array s...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide an inspection device and an inspection method of a capillary array sheet capable of detecting surely a gel defect of a through hole of the capillary array sheet. SOLUTION: This capillary array sheet inspection device 8 includes: a light source 10; a capillary array sheet holding means for fixing the capillary array sheet 1; lattices 16a, 16b, 16c, 16d for MTF measurement arranged on each prescribed position between the light source and the capillary array sheet held by the capillary array sheet holding means; a lattice direction changing means 14 for changing a lattice direction of the lattices for MTF measurement; and an imaging means 22 for imaging an image of the lattices for MTF measurement imaged by the capillary array sheet. COPYRIGHT: (C)2010,JPO&INPIT |
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