SACRIFICIAL COMPOSITION, METHOD OF USE OF THE SAME, AND METHOD OF DECOMPOSITION OF THE SAME

PROBLEM TO BE SOLVED: To provide a method of fabricating a structure. SOLUTION: The composition includes a sacrificial polymer for causing acid-catalyzed decomposition and a catalytic amount of a photoacid generator. COPYRIGHT: (C)2010,JPO&INPIT

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Bibliographische Detailangaben
Hauptverfasser:	HENDERSON CLIFFORD LEE, JAYACHANDRAN JOSEPH PAUL, WHITE CELESTA E, ALLEN SUEANN BIDSTRUP, KOHL PAUL A, REED HOLLIE
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMISTRY COMPOSITIONS BASED THEREON COMPOSITIONS OF MACROMOLECULAR COMPOUNDS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY METALLURGY MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES MICROSTRUCTURAL TECHNOLOGY ORGANIC MACROMOLECULAR COMPOUNDS PERFORMING OPERATIONS PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTUREOR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS SEMICONDUCTOR DEVICES THEIR PREPARATION OR CHEMICAL WORKING-UP TRANSPORTING USE OF INORGANIC OR NON-MACROMOLECULAR ORGANIC SUBSTANCES ASCOMPOUNDING INGREDIENTS
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a method of fabricating a structure. SOLUTION: The composition includes a sacrificial polymer for causing acid-catalyzed decomposition and a catalytic amount of a photoacid generator. COPYRIGHT: (C)2010,JPO&INPIT