METHOD AND APPARATUS FOR PRODUCING TUNGSTEN HEXAFLUORIDE USING FLUIDIZATION REACTOR

PROBLEM TO BE SOLVED: To provide a reaction system for production of tungsten hexafluoride, which has a remarkably reduced reactor volume, can more easily control a reaction heat and significantly improves reaction efficiency by allowing tungsten having a specific gravity of 19.25 g/cm3to be distributed uniformly in the whole of reactor inside, thus maximizing the contact area between tungsten and reactant gas. SOLUTION: The method for production of tungsten hexafluoride (WF6) using the fluidization reactor includes: introducing tungsten powder into a closed reactor; spraying a pressurized inert gas onto the tungsten powder to fluidize it; and continuously supplying the tungsten powder and a pressurized gaseous fluorinating agent to the fluidized bed of tungsten powder to perform a contact reaction in such a fluidized state. COPYRIGHT: (C)2010,JPO&INPIT