LINEAR PRESSURE FEED GRINDING USING VOICE COIL

PROBLEM TO BE SOLVED: To remove an accurate amount of glass from the edge of a glass substrate without deteriorating the desired strength and characteristics of the edge quality of the glass substrate. SOLUTION: An air bearing slide member 200 coupled to a grinding unit is configured so as to slide...

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Bibliographische Detailangaben
Hauptverfasser:	JAMES WILLIAM BROWN, RAJ BABAK ROBERT
Format:	Patent
Sprache:	eng
Schlagworte:	CHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUSENAMELS CHEMISTRY DRESSING OR CONDITIONING OF ABRADING SURFACES FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS GLASS GRINDING JOINING GLASS TO GLASS OR OTHER MATERIALS MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES METALLURGY MINERAL OR SLAG WOOL PERFORMING OPERATIONS POLISHING SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS,MINERALS OR SLAGS SURFACE TREATMENT OF GLASS TRANSPORTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To remove an accurate amount of glass from the edge of a glass substrate without deteriorating the desired strength and characteristics of the edge quality of the glass substrate. SOLUTION: An air bearing slide member 200 coupled to a grinding unit is configured so as to slide on a rail member 202 along a y-axis by a linear drive motor 204. A spindle motor 302 is configured such that a polishing-machine support member 304 is connected to the air bearing slide member 200 so as to drive a grinding wheel 300. The spindle motor is fixed to and supported by the polishing-machine support member 304. A vacuum chuck arranged close to the grinding wheel 300 is configured to hold a glass substrate by three-dimensionally aligning the glass substrate with respect to the grinding wheel 300. COPYRIGHT: (C)2010,JPO&INPIT