CARRIER AND SUBSTRATE CARRIER DEVICE

PROBLEM TO BE SOLVED: To provide a carrier capable of highly accurately positioning a glass substrate to the predetermined mounting position, and to provide a substrate carrier device provided with the same. SOLUTION: A positioning means 31 includes: an approximately L-shaped supporting member 32; a...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: IKUTEN YUYA, NAKAMURA HAJIME, SHINDO TAKAAKI, OCHIAI TOORU, ISHINO KOJI
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:PROBLEM TO BE SOLVED: To provide a carrier capable of highly accurately positioning a glass substrate to the predetermined mounting position, and to provide a substrate carrier device provided with the same. SOLUTION: A positioning means 31 includes: an approximately L-shaped supporting member 32; and a pressing member 33 for rotating the supporting member 32. The supporting member 32, for instance, is of an approximately L-shaped member with its whole part formed by a resin. The supporting member 32 is rotatably pivotally-fixed to a carrier frame 15 by a revolving shaft 34. The supporting member 32 also respectively hits and contacts a base 11b and a side 11c of the glass substrate 11. These parts where the supporting member 32 hits and contacts the glass substrate 11 are preferably formed, for instance, in the shape forming semicircular roll parts 32a, 32b. COPYRIGHT: (C)2010,JPO&INPIT