COMPOSITION OF ETCHING LIQUID FOR CONDUCTOR FILM

PROBLEM TO BE SOLVED: To provide a composition of etching liquid for conductor film assuring higher stability in processes and excellent economic processes for enabling effective etching of a conductor film without generation of residues after the etching process, suppressing generation of bubbles d...

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Bibliographische Detailangaben
Hauptverfasser:	TANIGUCHI WAKAKO, AOYAMA TETSUO, KAWASHIMA TAKESHI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING ELECTRIC HEATING ELECTRIC LIGHTING NOT OTHERWISE PROVIDED FOR ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY FREQUENCY-CHANGING NON-LINEAR OPTICS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL LOGIC ELEMENTS OPTICS PHYSICS SEMICONDUCTOR DEVICES TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a composition of etching liquid for conductor film assuring higher stability in processes and excellent economic processes for enabling effective etching of a conductor film without generation of residues after the etching process, suppressing generation of bubbles during the etching processes, and ensuring excellent solubility of indium oxalic acid. SOLUTION: An aqueous solution containing oxalic acid, hydrochloric, and interfacial active agent is used as an etching liquid (composition of etching liquid for conductor film). As the interfacial active agent, at least a kind of an anionic interfacial active agent, non-ionic interfacial active agent, fluorine system interfacial active agent is used. A transparent conductor film mainly formed of indium tin oxide or indium zinc oxide is etched with the composition of etching liquid for conductor film. COPYRIGHT: (C)2010,JPO&INPIT