HOLE SHAPE MEASURING APPARATUS AND HOLE SHAPE MEASURING METHOD

PROBLEM TO BE SOLVED: To precisely measure even a fine irregular shape formed on the wall surface of a hole as well as the whole shape of the hole. SOLUTION: A hole shape measuring apparatus is provided with focus error generation circuits 111, 112 for irradiating the wall surface of a hole to be me...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	UJIIE MASAHIKO
Format:	Patent
Sprache:	eng
Schlagworte:	MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS TESTING
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