HOLE SHAPE MEASURING APPARATUS AND HOLE SHAPE MEASURING METHOD

PROBLEM TO BE SOLVED: To precisely measure even a fine irregular shape formed on the wall surface of a hole as well as the whole shape of the hole. SOLUTION: A hole shape measuring apparatus is provided with focus error generation circuits 111, 112 for irradiating the wall surface of a hole to be measured with a laser beam from a tubular probe 80 and generating a focus error signal according to a deviation amount (focal deviation amount) between a focal position of the laser beam and a reflection position on the wall surface. A controller 100 moves the tubular probe 80 in a Z direction (the center axis direction of the tubular probe) while rotating the tubular probe 80, and spirally irradiates the wall surface of the hole to be measured with a laser beam. The hole shape measuring apparatus computes a three-dimensional shape of the hole to be measured based on the position of the tubular probe 80 in the Z direction and the rotation angle of the tubular probe 80 and the focal deviation amount obtained from the focus error signal. COPYRIGHT: (C)2010,JPO&INPIT