POLYMER COMPOUND-COVERED SILICON CARBIDE HEATING ELEMENT AND METHOD FOR PRODUCING THE SAME

PROBLEM TO BE SOLVED: To provide a silicon carbide heating element to which water or oil volatilized and dispersed from the object to be heated is not stuck, which is smoothly brought into contact with the object to be heated even when the silicon carbide heating element is brought into contact with the object to be heated to heat the object to be heated and by which the object to be heated is heated uniformly without damaging both of the silicon carbide heating element and the object to be heated and to provide a method for producing the silicon carbide heating element. SOLUTION: The above problems to be solved can be solved by using the silicon carbide heating element 1 the surface, at the least, of which is covered or coated with a polymer compound 3. The surface of the silicon carbide heating element 1, which has such a void structure that at least a part of an internal void 5 is communicated with the surface thereof, is covered or coated with the polymer compound. At least a part of the polymer compound, with which the surface of the silicon carbide heating element is covered or coated, preferably intrudes into the internal void 5. COPYRIGHT: (C)2010,JPO&INPIT