PIEZOELECTRIC ELEMENT, LIQUID EJECTING HEAD, AND LIQUID EJECTING APPARATUS

PROBLEM TO BE SOLVED: To provide a piezoelectric element capable of improving durability by suppressing stress concentration during displacement and to provide a liquid ejecting head and a liquid ejecting apparatus. SOLUTION: The piezoelectric element 6 includes in a laminated state a piezoelectric layer 15, a lower electrode film 14 as a first electrode formed on a lower surface of the piezoelectric layer, and an upper electrode film 16 as a second electrode formed on an upper surface of the piezoelectric layer. The piezoelectric layer has a film thickness of a 5 μm or less, and has a flat portion 15a in parallel with the lower surface and a lateral portion 15b inclined downwardly from the flat portion towards the lower surface side. The upper electrode film has a central portion 16a in parallel with the flat portion and a slope portion 16b inclined downwardly from the central portion towards the flat portion. The inclination angle θu of the slope portion to the flat portion is gentle as compared with the inclination angle θp of the lateral portion to the lower surface. COPYRIGHT: (C)2010,JPO&INPIT