CLEANING DEVICE

PROBLEM TO BE SOLVED: To provide a cleaning device capable of confirming that an annular frame holding a wafer is securely fixed at a prescribed position of a spinner table. SOLUTION: A frame holding mechanism 32 for holding the frame on the spinner table 31 includes a lower surface support member 321 having a holding surface to hold the lower surface of the annular frame, a pendulum member 322 the intermediate part of which is rockingly journaled by a support shaft 323 to the lower surface support member, and in which a pawl 322b to press the upper surface of the annular frame is provided at the upper side of the support shaft and a weight 322c is provided at the lower side of the support shaft. A regulating portion 321e located inside the pawl and projecting upward to regulate the peripheral fringe of the annular frame with the rotation of the spinner table stopped is provided in the lower surface support member 321. If the setting of the frame on the spinner table has deviation, the frame rides on the regulating portion and a vacuum suction force is lowered, and the deviation can be thereby detected. COPYRIGHT: (C)2010,JPO&INPIT