HYDROGEN GAS SENSOR AND METHOD FOR MANUFACTURING THE SAME

PROBLEM TO BE SOLVED: To provide a hydrogen gas sensor improved in durability in a simple structure, having a high detection sensitivity and a good response time, and excellent in hydrogen gas selectivity. SOLUTION: The hydrogen gas sensor includes a sensor element made up of a titanium oxide as a principal component, wherein a minute hole having an internal diameter of 500 nm or below, or a minute tube having an outer diameter of 1,000 nm or below, is formed on an insulating substrate, and is configured such that the electric resistance of the sensor element is varied in dependence upon a hydrogen concentration. The sensor element is preferably made of an anodic oxide film of a titanium alloy containing platinum or palladium of 0.01% or above. The hydrogen gas sensor is manufactured such that after producing a titanium thin film or titanium alloy thin film on the insulating substrate, the titanium thin film or the titanium alloy thin film is anodized. COPYRIGHT: (C)2010,JPO&INPIT