METHOD AND DEVICE FOR PRODUCING METAL OXIDE PARTICLE

PROBLEM TO BE SOLVED: To provide a method and device for producing metal oxide particles capable of efficiently and continuously producing the metal oxide particle by suppressing the generation of a film-like product stuck on an inside wall part of a reaction tube and rapidly heating and cooling a vapor of a metal chloride and oxygen. SOLUTION: In the method for producing the metal oxide particles by circulating a reaction gas to a reaction pipe 11 having a partial double pipe structure wherein a hollow inner cylinder 5 is inserted at an upstream part of a hollow outer cylinder 1, the reaction gas containing the metal chloride is made to flow into the inner cylinder 5, and also the reaction gas and a barrier gas are preheated on the upstream side of the down stream end part 5b of the hollow inner cylinder 5 while the barrier gas containing no metal chloride is made to flow between the hollow inner cylinder 5 and the hollow outer cylinder 1, and the metal chloride is thermally decomposed by actually heating the reaction gas at a region remote on a downstream side of the downstream end part 5b of the hollow inner cylinder 5. COPYRIGHT: (C)2010,JPO&INPIT