CONTACT PROBE

PROBLEM TO BE SOLVED: To provide a contact probe for preventing melt fracture and plastic deformation of the contact probe even if a high current flows to the contact probe when applying voltage from the contact probe to an inspection target. SOLUTION: In the contact probe where a first layer 11 and...

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Bibliographische Detailangaben
Hauptverfasser:	NAKATANI MASAHIRO, NAGATA KAZUSHI, TARUMI KENICHI, SAKAMOTO TETSUNAO
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS SEMICONDUCTOR DEVICES TESTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a contact probe for preventing melt fracture and plastic deformation of the contact probe even if a high current flows to the contact probe when applying voltage from the contact probe to an inspection target. SOLUTION: In the contact probe where a first layer 11 and a second layer 14 are formed in a layer structure, the first layer 11 is formed by a material having a coefficient of elasticity higher than that of the second layer 14, and the second layer 14 is formed by a conductive material having resistivity smaller than that of the first layer 11. Further, the first and second layers 11, 14 are adjacent near both the ends of the contact probe and are separated at the center of the contact probe. COPYRIGHT: (C)2010,JPO&INPIT