ULTRASONIC MEASURING APPARATUS

PROBLEM TO BE SOLVED: To supply an ultrasonic wave to the surface of a measuring object in a non-contact manner, without damaging the surface of the measuring object. SOLUTION: Near the surface 10a of the measuring object 10, a target 72 having a specific heat larger than that of air is arranged without touching the surface 10a of the measuring object 10. A prism 26 reflects a laser beam 23 from a focusing lens 24, in the direction which makes its optical axis 23b after the reflection parallel to the surface 10a of the measuring object 10 and makes the beam pass the tip of the target 72. The focusing lens 24 focuses the energy of the laser beam 23 at the tip of the target 72. The ultrasonic wave 27 is supplied to the surface 10a of the measuring object 10 in a non-contact manner, by generating plasma from the tip of the target 72 as a starting point, by the energy of the laser beam 23 focused at the tip of the target 72. COPYRIGHT: (C)2010,JPO&INPIT