FILM DEPOSITION METHOD

PROBLEM TO BE SOLVED: To provide a film deposition method which can produce an oil-repellent base material having an excellent oil-repellent film provided with wear resistance to withstand practical use. SOLUTION: The film deposition method comprises: a first irradiation stage where the surface of a...

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Hauptverfasser:	SUGAWARA TAKUYA, SHIONO ICHIRO, NAGAE EKISHU, KYO YUSHO
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUSENAMELS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY GLASS INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL JOINING GLASS TO GLASS OR OTHER MATERIALS METALLURGY MINERAL OR SLAG WOOL SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS,MINERALS OR SLAGS SURFACE TREATMENT OF GLASS SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a film deposition method which can produce an oil-repellent base material having an excellent oil-repellent film provided with wear resistance to withstand practical use. SOLUTION: The film deposition method comprises: a first irradiation stage where the surface of a substrate 101 is irradiated with grains having energy; a first film deposition stage where a first film 103 is deposited on the surface of the substrate 101 after the first irradiation stage using a dry process; and a second film deposition stage where a second film 105 having oil repellency is deposited on the surface of the first film 103. COPYRIGHT: (C)2010,JPO&INPIT