METHOD OF REMOVING THIN FILM BY LASER BEAM, AND METHOD OF MANUFACTURING THIN-FILM SOLAR CELL PANEL

PROBLEM TO BE SOLVED: To provide a method of removing a peripheral part of a laminated film in a thin-film solar cell panel including its base layer by using a laser scribe method. SOLUTION: By irradiating the peripheral part of the laminated film of the thin-film solar cell panel having the laminat...

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Bibliographische Detailangaben
Hauptverfasser: YAMAMOTO YOSHIAKI, ONISHI YOSHINORI, TAMAGAWA KOICHI, IKEDA HITOSHI
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide a method of removing a peripheral part of a laminated film in a thin-film solar cell panel including its base layer by using a laser scribe method. SOLUTION: By irradiating the peripheral part of the laminated film of the thin-film solar cell panel having the laminated film having a transparent electrode film, a silicon film and a metal film on a transparent substrate formed on the base layer with a laser beam oscillated from a CW laser of output power ≥200W, the laminated film is removed over the whole circumference of the peripheral part including the base layer. The thin-film solar cell panel is manufactured by thus removing the thin film of the peripheral part. COPYRIGHT: (C)2010,JPO&INPIT