X-RAY INSPECTING DEVICE
PROBLEM TO BE SOLVED: To provide an X-ray inspection device capable of surely detecting an abnormal condition of a shielding unit with an inexpensive construction. SOLUTION: The X-ray inspecting device 1 includes an X-ray generator 9 to irradiate to an object W to be inspected in an inspection space...
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Sprache: | eng |
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide an X-ray inspection device capable of surely detecting an abnormal condition of a shielding unit with an inexpensive construction. SOLUTION: The X-ray inspecting device 1 includes an X-ray generator 9 to irradiate to an object W to be inspected in an inspection space 22 with an X-ray, an X-ray detector 10 to detect an X-ray transmitting through the object W to be inspected and output concentration data in response to an amount of transmission thereof, a shielding curtain 16 to prevent an X-ray generated by the X-ray generator 9 from leaking to the outside of the inspection space 22. The X-ray inspecting device 1 to inspect the object W based on the concentration data outputted from the X-ray detector 10, includes an illuminance sensor 13 to measure the illuminance of light entered in the inspection space 22 through the shielding curtain 16, and a determining unit 17 to determine that the shielding curtain 16 is in an abnormal condition when illuminance of a predetermined value or greater is continuously measured for a predetermined time by the illuminance curtain 13. COPYRIGHT: (C)2010,JPO&INPIT |
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