SUBSTRATE HOLDER HOLDING APPARATUS AND SUBSTRATE HOLDER STORING CHAMBER

PROBLEM TO BE SOLVED: To provide a substrate holder holding apparatus of a small size with a simple structure. SOLUTION: The substrate holder holding apparatus includes: first and second holding mechanisms which are stored in a chamber and are each structured so as to be capable of holding a plurali...

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Bibliographische Detailangaben
Hauptverfasser:	WAKABAYASHI HIDENORI, TOSAKA TAKASHI
Format:	Patent
Sprache:	eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INFORMATION STORAGE INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORDCARRIER AND TRANSDUCER INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY PHYSICS SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a substrate holder holding apparatus of a small size with a simple structure. SOLUTION: The substrate holder holding apparatus includes: first and second holding mechanisms which are stored in a chamber and are each structured so as to be capable of holding a plurality of the substrate holders 8 along a column; a driving means for a column direction, which moves the first holding mechanism in the column direction relatively with respect to the second holding mechanism; a transferring mechanism 30 which transfers the substrate holder between the first and second holding mechanisms; and an interlocking mechanism which changes the position of the substrate holder 8 in the column direction in the first or second holding mechanism by making the transferring mechanism 30 interlocked with the driving means for the column direction. COPYRIGHT: (C)2010,JPO&INPIT