DATA PROCESSING DEVICE AND DATA PROCESSING METHOD, AND CHECK WORK SUPPORT SYSTEM USING THE SAME

PROBLEM TO BE SOLVED: To provide a tool capable of readily analyzing a number of defects detected, under a plurality of inspection conditions by an inspection apparatus. SOLUTION: The data processing apparatus includes a storage device for obtaining the coordinates of a plurality of defects, obtaine...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	FUNAKOSHI TOMOHIRO, ABE CHIKAKO, SUGAWARA HITOSHI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS SEMICONDUCTOR DEVICES TESTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a tool capable of readily analyzing a number of defects detected, under a plurality of inspection conditions by an inspection apparatus. SOLUTION: The data processing apparatus includes a storage device for obtaining the coordinates of a plurality of defects, obtained by inspecting an object under a plurality of inspection conditions from an inspection apparatus and storing them, in relation to the inspection conditions; an arithmetic unit for coordinate matching, to detect the existence of common coordinates to at least two inspection conditions among the plurality of inspection conditions; and a display device for displaying the defects obtained under at least two inspection conditions with a plurality of defect coordinate maps, and selects proper inspection conditions. COPYRIGHT: (C)2010,JPO&INPIT