PREBAKE METHOD AND PREBAKE APPARATUS

PROBLEM TO BE SOLVED: To provide a prebake method that can achieve in-plane uniformity of a thickness of a resin film and can shorten an exhaustion time period after a substrate is carried when a workpiece is subjected to prebaking, wherein the workpiece has the resin film formed by applying an appl...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	KOBASHI YASUHIRO, AWAKAWA HIDEO, KAI TOMOHIRO
Format:	Patent
Sprache:	eng
Schlagworte:	DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING FREQUENCY-CHANGING NON-LINEAR OPTICS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICAL LOGIC ELEMENTS OPTICS PHYSICS TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF
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