SCRIBING DEVICE AND SUBSTRATE SPLITTING SYSTEM

PROBLEM TO BE SOLVED: To provide a scribing device, wherein the need of separately using a carrying mechanism for the carrying-in and carrying-out of a brittle substrate such as a liquid crystal panel substrate to the device is eliminated, even in the case a liquid crystal panel substrate is scribed...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: OKITA TAKESHI, EJIMATANI AKIRA
Format: Patent
Sprache:eng
Schlagworte:
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