SCRIBING DEVICE AND SUBSTRATE SPLITTING SYSTEM

PROBLEM TO BE SOLVED: To provide a scribing device, wherein the need of separately using a carrying mechanism for the carrying-in and carrying-out of a brittle substrate such as a liquid crystal panel substrate to the device is eliminated, even in the case a liquid crystal panel substrate is scribed on a belt conveyer, without depending on the positional relation between the position of the vent holes in a table at the lower side of a belt in the belt conveyer and the position of the vent holes in the belt, the liquid crystal panel substrate can be sucked or floated up on the table via the belt. SOLUTION: There is disclosed the scribing device for scribing the liquid crystal panel substrate W, on a table serving also as a belt conveyer, wherein a ventilation layer is formed on the back face of a conveyer belt 245, and a liquid crystal panel substrate W arranged on the belt is floated up or sucked and fixed on the table by an air flow generated at the vent holes 241a of the surface in the body 241 of the table, without depending on the positional relation between the vent holes 245a1 of the belt 245 and the vent holes 241a in the surface of the table. COPYRIGHT: (C)2010,JPO&INPIT