SURFACE TREATMENT APPARATUS

PROBLEM TO BE SOLVED: To provide a surface treatment apparatus that suppresses the deterioration of a surface of a body to be treated caused by an electron beam. SOLUTION: The surface treatment apparatus includes: a reaction tube 10 having a first opening 11 at one end, a second opening 12 at the ot...

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Bibliographische Detailangaben
Hauptverfasser:	YANAGISAWA YUTARO, FUJITA KATSUYOSHI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a surface treatment apparatus that suppresses the deterioration of a surface of a body to be treated caused by an electron beam. SOLUTION: The surface treatment apparatus includes: a reaction tube 10 having a first opening 11 at one end, a second opening 12 at the other end, and a treatment liquid supply hole 13 on a side surface; a shield member 16a provided to close a portion of the first opening 11; an electron beam irradiation means 20 of irradiating the shield member 16a with an electron beam from the second opening 12; and a treatment liquid atomizing means 30 of atomizing a treatment liquid to the electron beam path 17 in the reaction tube 10 from the treatment liquid supply hole 13 to the first opening 11. COPYRIGHT: (C)2010,JPO&INPIT