METHOD OF ADJUSTING OPTICAL AXIS OF LASER DISTANCE MEASURING UNIT IN CHARGED PARTICLE BEAM DRAWING APPARATUS

PROBLEM TO BE SOLVED: To provide a method for efficiently positioning the optical axis of a laser distance measuring unit 51, 52provided in a charged particle beam drawing apparatus for measuring the position of a stage 2 so that the optical axis crosses a beam center of a charged particle beam. SOLUTION: This method of adjusting an optical axis comprises: fixing at a stage 2 an adjusting jig 6 in which there are formed a marker part 64 indicating a predetermined position point 64a and target parts 661, 662which a laser beam enters when the optical axis of a laser beam of laser distance measuring units 51, 52is positioned on lines in X and Y directions passing through the point 64a; adjusting the position of the stage 2 so that the point 64a meets the beam center; and adjusting the position of the optical axis of the laser distance measuring units 51, 52so that laser beams of the laser distance measuring units 51, 52enter the target parts 661, 662. COPYRIGHT: (C)2010,JPO&INPIT