DICING/DIE BONDING TAPE AND METHOD FOR MANUFACTURING SEMICONDUCTOR CHIP

PROBLEM TO BE SOLVED: To provide a dicing/die bonding tape cutting a die bonding film with high precision by laser dicing and easily peeling a semiconductor chip together with the die bonding film after laser dicing. SOLUTION: The dicing/die bonding tape 1 for laser dicing includes a die bonding fil...

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Bibliographische Detailangaben
Hauptverfasser: NOZATO SEIJI, FUKUOKA MASATERU
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide a dicing/die bonding tape cutting a die bonding film with high precision by laser dicing and easily peeling a semiconductor chip together with the die bonding film after laser dicing. SOLUTION: The dicing/die bonding tape 1 for laser dicing includes a die bonding film 3 and a non-adhesive film 4 stuck to one surface of the die bonding film 3. The die bonding film 3 includes a thermosetting compound and a thermosetting agent. The non-adhesive film 4 includes a crosslinked product of a (meth)acrylic resin composition as a main component and has a gel fraction of 60-100%. COPYRIGHT: (C)2010,JPO&INPIT