METHOD OF AND DEVICE FOR POLISHING SURFACE OF SUBSTRATE-PLACING PLATE FOR SUBSTRATE-PLACING DEVICE

PROBLEM TO BE SOLVED: To provide a method of and a device for mirror-polishing a surface of a substrate (chuck)-placing plate for a substrate-placing device having projections on its surface especially capable of polishing side surfaces of the projections and the surface of the chuck covered with th...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	KOMATSU KATSUHIKO
Format:	Patent
Sprache:	eng
Schlagworte:	DRESSING OR CONDITIONING OF ABRADING SURFACES FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS GRINDING MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING PERFORMING OPERATIONS POLISHING TRANSPORTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!