APPARATUS FOR TREATING HALOGEN-CONTAINING GAS

PROBLEM TO BE SOLVED: To provide an apparatus for treating a halogen-containing gas that enables highly efficient treatment and has a structure meeting users' needs. SOLUTION: The apparatus for treating the halogen-containing gas includes: a cleaning unit 31 for removing byproducts generated in...

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Bibliographische Detailangaben
Hauptverfasser:	KUZUMOTO MASAKI, GOTO TOYOICHI, DOI MASAFUMI, INANAGA YASUTAKA, YOSHIDA KIYOHIKO, WADA NOBORU
Format:	Patent
Sprache:	eng
Schlagworte:	ACYCLIC OR CARBOCYCLIC COMPOUNDS APPARATUS THEREFOR CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSEGASES [GHG] CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY CHEMISTRY GENERAL METHODS OF ORGANIC CHEMISTRY GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS METALLURGY ORGANIC CHEMISTRY PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL SEPARATION TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINSTCLIMATE CHANGE THEIR RELEVANT APPARATUS TRANSPORTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide an apparatus for treating a halogen-containing gas that enables highly efficient treatment and has a structure meeting users' needs. SOLUTION: The apparatus for treating the halogen-containing gas includes: a cleaning unit 31 for removing byproducts generated in decomposition of the halogen-containing gas; a gas separation unit 321 for separating gases other than halogen-series gases from the halogen-containing gas to enrich the halogen-series gases; a gas-decomposing unit 36 for decomposing the enriched halogen-series gases; and an exhaust gas circulation unit 352 for returning the discharged gas, that has been treated in the gas-decomposing unit 36 and discharged, to the cleaning unit 31. These units are arranged orderly in series in the direction of flow of the halogen-containing gas containing the halogen-series gases supplied from a halogen-containing gas supply unit. COPYRIGHT: (C)2010,JPO&INPIT