THERMAL INSULATION STAMPER AND METHOD OF MANUFACTURING THE SAME

PROBLEM TO BE SOLVED: To provide a thermal insulation stamper which has sufficient rigidity in the thickness direction while maintaining an adhesive force between a substrate layer and a thermal insulation layer, and a method of manufacturing the thermal insulation stamper. SOLUTION: The thermal ins...

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Bibliographische Detailangaben
Hauptverfasser: KOTAKA KAZUHIRO, MIYAZAKI TSUYOSHI
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide a thermal insulation stamper which has sufficient rigidity in the thickness direction while maintaining an adhesive force between a substrate layer and a thermal insulation layer, and a method of manufacturing the thermal insulation stamper. SOLUTION: The thermal insulation stamper 5 includes a first Ni layer 2 having a surface with a fine uneven pattern, a thermal insulation layer 3 formed on a surface of the first Ni layer 2 opposite to the surface with the fine uneven pattern, and a second Ni layer 4 formed on a surface of the thermal insulation layer 3 opposite to the first Ni layer 2. The thermal insulation layer 3 includes minute hollow spheres. COPYRIGHT: (C)2010,JPO&INPIT