DISPLACEMENT MEASURING SENSOR AND DISPLACEMENT MEASURING SYSTEM
PROBLEM TO BE SOLVED: To provide a displacement measuring sensor and a displacement measuring system for highly sensitively measuring the displacement. SOLUTION: A piezoelectric film structure 10, composed of projection-shaped parts 101 and recessed parts 102 formed by inverting the same shape, is f...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a displacement measuring sensor and a displacement measuring system for highly sensitively measuring the displacement. SOLUTION: A piezoelectric film structure 10, composed of projection-shaped parts 101 and recessed parts 102 formed by inverting the same shape, is formed by processing a piezoelectric film made of a flat material. Long sides of the respective projection-shaped part 101 and recessed part 102 are cyclically connected with each other via flat strip-shaped parts respectively. Further, the projection-shaped part 101 and the recessed part 102 are connected with each other in such a way that slopes of the same inclination face each other by the strip-shaped part with displacement of half a cycle. In this way, the displacement is measured by measuring the signal voltage output from the piezoelectric film structure 10 tucked in such a way as to generate a negative Poisson's ratio. COPYRIGHT: (C)2010,JPO&INPIT |
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