SAMPLE HOLDER AND SAMPLE ANALYZER USING THE SAME
PROBLEM TO BE SOLVED: To rotate and tilt a sample to be observed, in a sample analyzer capable of analyzing the variation in structure, composition and electronic state in a device when the device is turned on/off by applying a single line of or a plurality of lines of external voltage to a proper p...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To rotate and tilt a sample to be observed, in a sample analyzer capable of analyzing the variation in structure, composition and electronic state in a device when the device is turned on/off by applying a single line of or a plurality of lines of external voltage to a proper portion of the sample to be observed such as a plug and a wiring structure included in a device formed in the sample to be observed. SOLUTION: In the sample analyzer having a sample holder body provided with a sample tilting mechanism, a sample carrier includes a first fixing member, a second fixing member, a transformative connection portion connecting the first and second fixing members to each other, a single or a large number of wiring structures formed on the connection portion to electrically connect the first and second fixing members to each other. The sample tilting mechanism is operated to adjust the tilting angle, and the sample holder body is rotated around a rotation pivot provided at a chip of the sample holder body to adjust the rotation angle. COPYRIGHT: (C)2010,JPO&INPIT |
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