SUBSTRATE STORAGE CASE
PROBLEM TO BE SOLVED: To provide an inexpensive substrate storage case of excellent cleaning property and drying property of a case itself which is capable of preventing a substrate from being damaged or polluted by internal dust in the case where the substrate such as a photomask is stored, maintai...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide an inexpensive substrate storage case of excellent cleaning property and drying property of a case itself which is capable of preventing a substrate from being damaged or polluted by internal dust in the case where the substrate such as a photomask is stored, maintained and carried, easily handled and capable of suppressing dust generation when the substrate is taken in/taken out. SOLUTION: In the substrate storage case, a supporting part protruded from an inner surface of each lid is provided on four corners of an upper lid and an lower lid and the substrate is simultaneously positioned at and supported by the supporting part of the lower lid by each two edges on the lower surface side of the four corners of the substrate and each two edges on the upper surface side of the four corners of the substrate are fixed by the supporting part of the upper lid by closing the upper lid to store the substrate, wherein a hinge is positioned higher than the center of the thickness of the case and a lock part to seal the upper lid and the lower lid is positioned lower than the hinge. COPYRIGHT: (C)2010,JPO&INPIT |
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