VACUUM CHAMBER

PROBLEM TO BE SOLVED: To provide a vacuum chamber having a differential gas discharge seal such that a substrate is carried in and out in a state where desired vacuum pressure is maintained in a process room. SOLUTION: The vacuum chamber 10 includes a floating chuck 40 as a substrate conveying mecha...

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Bibliographische Detailangaben
Hauptverfasser:	NAKAMURA TAKESHI, MATSUZAKA MASAAKI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS BLASTING CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY CONVEYING CYLINDERS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS HANDLING THIN OR FILAMENTARY MATERIAL HEATING LIGHTING MECHANICAL ENGINEERING PACKING PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL PISTONS PNEUMATIC TUBE CONVEYORS SEALINGS SEMICONDUCTOR DEVICES SHOP CONVEYOR SYSTEMS STORING THEIR RELEVANT APPARATUS THERMAL INSULATION IN GENERAL TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING ORTIPPING TRANSPORTING WEAPONS
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